Electrical properties of Si–LiNbO3 heterostructures grown...

Thin Solid Films 2014 / 02 Vol. 552

Electrical properties of Si–LiNbO3 heterostructures grown by radio-frequency magnetron sputtering in an Ar+O2 environment

Sumets, M., Ievlev, V., Kostyuchenko, A., Vakhtel, V., Kannykin, S., Kobzev, A.
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Volume:
552
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.12.005
Date:
February, 2014
File:
PDF, 702 KB
english, 2014
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