Effect of rapid thermal annealing on the composition of...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2013 / 07 Vol. 306

Effect of rapid thermal annealing on the composition of Au/Ti/Al/Ti ohmic contacts for GaN-based microdevices

Redondo-Cubero, A., Ynsa, M.D., Romero, M.F., Alves, L.C., Muñoz, E.
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Volume:
306
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2012.12.030
Date:
July, 2013
File:
PDF, 2.33 MB
english, 2013
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