High purity Si–C–N thin films with tailored composition on...

Diamond and Related Materials 2007 / 4 Vol. 16; Iss. 4-7

High purity Si–C–N thin films with tailored composition on the tie line SiC–Si3N4

Rudolphi, M., Bruns, M., Baumann, H., Geckle, U.
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Volume:
16
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2006.12.037
Date:
April, 2007
File:
PDF, 549 KB
english, 2007
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