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Nanoscale friction and wear properties of silicon wafer under different lubrication conditions
Chen, Xiaochun, Zhao, Yongwu, Wang, Yongguang, Zhou, Hailan, Ni, Zhifeng, An, WeiVolume:
282
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.04.148
Date:
October, 2013
File:
PDF, 1.33 MB
english, 2013