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Comparative studies on damages to organic layer during the deposition of ITO films by various sputtering methods
Lei, Hao, Wang, Meihan, Hoshi, Yoichi, Uchida, Takayuki, Kobayashi, Shinichi, Sawada, YutakaVolume:
285
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.08.065
Date:
November, 2013
File:
PDF, 1015 KB
english, 2013