Process optimization and simplification of self-aligned...

Process optimization and simplification of self-aligned triple patterning

Chen, Yijian
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.06.011
Date:
October, 2012
File:
PDF, 944 KB
english, 2012
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