Investigations on electrical properties of a-C:H thin films...

Diamond and Related Materials 2008 / 7 Vol. 17; Iss. 7-10

Investigations on electrical properties of a-C:H thin films deposited in a Microwave Multipolar Plasma reactor excited at Distributed Electron Cyclotron Resonance

Kihel, M., Clergereaux, R., Escaich, D., Calafat, M., Raynaud, P., Sahli, S., Segui, Y.
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Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2008.01.036
Date:
July, 2008
File:
PDF, 366 KB
english, 2008
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