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Effect of prior C, Si and Sn implantation on the etch rate of CVD diamond
Leech, P.W., Perova, T., Moore, R.A., Reeves, G.K., Holland, A.S., Ridgway, M.Volume:
15
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2005.09.034
Date:
September, 2006
File:
PDF, 164 KB
english, 2006