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Structural relaxation of sputtered amorphous carbon nitride films during thermal annealing
Lejeune, M., Benlahsen, M.Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2007.09.015
Date:
January, 2008
File:
PDF, 396 KB
english, 2008