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Fabrication of an electro-optical Bragg modulator based on plasma dispersion effect in silicon
Shahmoon, Asaf, Limon, Ofer, Businaro, Luca, Ciasca, Gabriele, Azugi, Yhonathan, Gerardino, Annamaria, Zalevsky, ZeevVolume:
105
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.12.023
Date:
May, 2013
File:
PDF, 1.16 MB
english, 2013