Ion implantation in CVD diamond and plasma treatment effect

Diamond and Related Materials 1995 / 5 Vol. 4; Iss. 5-6

Ion implantation in CVD diamond and plasma treatment effect

Yagyu, Hiroyuki, Deguchi, Masahiro, Won, Jai Hyung, Mori, Yusuke, Hatta, Akimitsu, Kitabatake, Makoto, Ito, Toshimichi, Hirao, Takashi, Hiraki, Akio
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Volume:
4
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(94)05291-3
Date:
May, 1995
File:
PDF, 526 KB
english, 1995
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