A method for characterizing the pad surface texture and...

Microelectronic Engineering 2013 / 4 Vol. 104

A method for characterizing the pad surface texture and modeling its impact on the planarization in CMP

Vasilev, Boris, Bott, Sascha, Rzehak, Roland, Liske, Romy, Bartha, Johann W.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
104
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.10.007
Date:
April, 2013
File:
PDF, 1.54 MB
english, 2013
Conversion to is in progress
Conversion to is failed