In situ measurement of stresses in diamond-like carbon films
Delplancke-Ogletree, Marie-Paule, Monteiro, Othon R.Volume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(03)00240-1
Date:
December, 2003
File:
PDF, 234 KB
english, 2003