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Formation of cubic boron nitride thin films using ECR plasma enhanced CVD
Ye, M, Delplancke-Ogletree, M.PVolume:
9
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00257-0
Date:
July, 2000
File:
PDF, 372 KB
english, 2000