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MOEMS uniaxial accelerometer based on EpoClad/EpoCore photoresists with built-in fiber clamp
Guan, T., Keulemans, G., Ceyssens, F., Puers, R.Volume:
193
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2012.12.030
Date:
April, 2013
File:
PDF, 1.68 MB
english, 2013