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Diamond electro-mechanical micro devices — technology and performance
Kohn, E., Adamschik, M., Schmid, P., Ertl, S., Flöter, A.Volume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(01)00396-X
Date:
September, 2001
File:
PDF, 1.46 MB
english, 2001