Bonding structure of carbon nitride films deposited by...

Diamond and Related Materials 2001 / 3 Vol. 10; Iss. 3-7

Bonding structure of carbon nitride films deposited by reactive plasma beam sputtering

Angleraud, B, Mubumbila, N, Tessier, P.Y, Fernandez, V, Turban, G
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Volume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00384-8
Date:
March, 2001
File:
PDF, 120 KB
english, 2001
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