![](/img/cover-not-exists.png)
Bonding structure of carbon nitride films deposited by reactive plasma beam sputtering
Angleraud, B, Mubumbila, N, Tessier, P.Y, Fernandez, V, Turban, GVolume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00384-8
Date:
March, 2001
File:
PDF, 120 KB
english, 2001