Mapping of 6H-SiC for implantation control
Morvan, E, Godignon, P, Montserrat, J, Flores, D, Jorda, X, Vellvehi, MVolume:
8
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(98)00411-7
Date:
March, 1999
File:
PDF, 597 KB
english, 1999