Effects of gas-flow sequences on the self-limiting mechanisms of GaAsN films grown by atomic layer epitaxy
Suzuki, Hidetoshi, Sadato, Hajime, Haraguchi, Tomohiro, Yamauchi, Toshihiro, Ozeki, Masashi, Ikari, TetsuoVolume:
540
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.06.018
Date:
July, 2013
File:
PDF, 682 KB
english, 2013