New technique for aberration diagnostics and alignment of...

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2013 / 8 Vol. 720

New technique for aberration diagnostics and alignment of an extreme ultraviolet Schwarzschild objective

Bollanti, S., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A.
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Volume:
720
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
DOI:
10.1016/j.nima.2012.12.008
Date:
August, 2013
File:
PDF, 1.19 MB
english, 2013
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