Nanopatterning of metallic features over uniformed arrays...

Microelectronic Engineering 2012 / 10 Vol. 98

Nanopatterning of metallic features over uniformed arrays of microbowl structures

Mohammadkhani, A., Hassanin, H., Anthony, C., Jiang, K.
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.05.064
Date:
October, 2012
File:
PDF, 1.08 MB
english, 2012
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