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Optical emission spectroscopy of deposition process of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films by using a coaxial arc plasma gun
Hanada, Kenji, Nishiyama, Takashi, Yoshitake, Tsuyoshi, Nagayama, KunihitoVolume:
19
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2010.02.019
Date:
July, 2010
File:
PDF, 800 KB
english, 2010