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Pulsed Direct liquid Injection ALD of TiO2 Films Using Titanium Tetraisopropoxide Precursor
Avril, L., Decams, J.M., Imhoff, L.Volume:
46
Year:
2013
Language:
english
Journal:
Physics Procedia
DOI:
10.1016/j.phpro.2013.07.063
File:
PDF, 453 KB
english, 2013