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Growth of few-layer graphene on SiC at low temperature with the fluorocarbon plasma pre-etching
Xu, Yijun, Wu, Xuemei, Ye, Chao, Deng, Yanhong, Chen, Tian, Ge, ShuibingVolume:
527
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.12.013
Date:
January, 2013
File:
PDF, 462 KB
english, 2013