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Growth stress evolution in HfO2/SiO2 multilayers
Li, Jingping, Fang, Ming, He, Hongbo, Shao, Jianda, Fan, Zhengxiu, Li, ZhaoyangVolume:
526
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.11.014
Date:
December, 2012
File:
PDF, 504 KB
english, 2012