Advances in atmospheric pressure PECVD: The influence of...

Advances in atmospheric pressure PECVD: The influence of plasma parameters on film morphology

Hodgkinson, J.L., Sheel, D.W.
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Volume:
230
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.06.079
Date:
September, 2013
File:
PDF, 446 KB
english, 2013
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