Radiofrequency power effects on the optical and structural...

Thin Solid Films 2013 / 10 Vol. 545

Radiofrequency power effects on the optical and structural properties of hydrogenated silicon films prepared by radiofrequency magnetron sputtering

Bouizem, Y., Abbes, C., Kefif, K., Sib, J.D., Benlakehal, D., Kebab, A., Chahed, L.
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Volume:
545
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.08.053
Date:
October, 2013
File:
PDF, 521 KB
english, 2013
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