Fabrication of single crystal silicon micro-/nanostructures...

Microelectronic Engineering 2012 / 10 Vol. 98

Fabrication of single crystal silicon micro-/nanostructures and transferring them to flexible substrates

Dahiya, Ravinder S., Adami, Andrea, Collini, Cristian, Lorenzelli, Leandro
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.084
Date:
October, 2012
File:
PDF, 1.41 MB
english, 2012
Conversion to is in progress
Conversion to is failed