Magnetron sputter deposition onto fluidized particle beds
Baechle, Daniel M., Demaree, John D., Hirvonen, James K., Wetzel, Eric D.Volume:
221
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.01.032
Date:
April, 2013
File:
PDF, 2.63 MB
english, 2013