The effect of neutron irradiation on the properties of SiC...

Applied Surface Science 2013 / 3 Vol. 269

The effect of neutron irradiation on the properties of SiC and SiC(N) layer prepared by plasma enhanced chemical vapor deposition

Huran, Jozef, Valovič, Albín, Boháček, Pavol, Shvetsov, Valery N., Kobzev, Alexander P., Borzakov, Sergey B., Kleinová, Angela, Sekáčová, Mária, Arbet, Juraj, Sasinková, Vlasta
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Volume:
269
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2012.10.162
Date:
March, 2013
File:
PDF, 689 KB
english, 2013
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