XPS studies of amorphous SiCN thin films prepared by nitrogen ion-assisted pulsed-laser deposition of SiC target
Yamamoto, Kazuhiro, Koga, Yoshinori, Fujiwara, ShuzoVolume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(01)00422-8
Date:
September, 2001
File:
PDF, 171 KB
english, 2001