Effect of gas type, pressure and temperature on the...

Vacuum 2013 / 8 Vol. 94

Effect of gas type, pressure and temperature on the electrical characteristics of Al-doped SnO2 thin films deposited by RGTO method for gas sensor application

Ammar, A.H., Abo-Ghazala, M.S., Farag, A.A.M., Abdel-Moniem, N.M., Farag, El-Sayed M.
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Volume:
94
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2013.01.013
Date:
August, 2013
File:
PDF, 1.30 MB
english, 2013
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