In-situ determination of the coefficient of thermal...

Thin Solid Films 2014 / 02 Vol. 552

In-situ determination of the coefficient of thermal expansion of polysilicon thin films using micro-rotating structures

Liu, Hai-Yun, Li, Wei-Hua, Zhou, Zai-Fa, Huang, Qing-An
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Volume:
552
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.11.094
Date:
February, 2014
File:
PDF, 1.30 MB
english, 2014
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