![](/img/cover-not-exists.png)
Numerical simulation of plasma immersion ion implantation on the inner surface of a cylindrical dielectric target
Li, Yun-Hu, Li, Xue-Chun, Wang, You-NianVolume:
229
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.06.025
Date:
August, 2013
File:
PDF, 980 KB
english, 2013