Experimental and kinetic studies of C–H–O plasmas for...

Diamond and Related Materials 2009 / 5 Vol. 18; Iss. 5-8

Experimental and kinetic studies of C–H–O plasmas for polycrystalline and nano-smooth diamond deposition

Gries, T., de Persis, S., Vandenbulcke, L., Met, C., Delfau, J.L., De Barros-Bouchet, M.I.
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Volume:
18
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2009.01.032
Date:
May, 2009
File:
PDF, 380 KB
english, 2009
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