Precision tool setting for fabrication of a microstructure...

Precision tool setting for fabrication of a microstructure array

Gao, Wei, Chen, Yuan-Liu, Lee, Kang-Won, Noh, Young-Jin, Shimizu, Yuki, Ito, So
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Volume:
62
Year:
2013
Language:
english
Journal:
CIRP Annals - Manufacturing Technology
DOI:
10.1016/j.cirp.2013.03.013
File:
PDF, 926 KB
english, 2013
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