Preparation and tunable optical properties of ion beam sputtered SiAlON thin films
Liu, Guanghui, Zhou, Zhenzhen, Wei, Qinhua, Fei, Fan, Yang, Hua, Liu, QianVolume:
101
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2013.07.015
Date:
March, 2014
File:
PDF, 1.10 MB
english, 2014