High temperature chemical vapor deposition of aluminum...

Surface and Coatings Technology 2013 / 09 Vol. 230

High temperature chemical vapor deposition of aluminum nitride, growth and evaluation

Pons, M., Boichot, R., Coudurier, N., Claudel, A., Blanquet, E., Lay, S., Mercier, F., Pique, D.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
230
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.06.011
Date:
September, 2013
File:
PDF, 1.73 MB
english, 2013
Conversion to is in progress
Conversion to is failed