1.6 Composition and stress state of thin films deposited by...

Vacuum 1977 Vol. 27; Iss. 3

1.6 Composition and stress state of thin films deposited by ion beam sputtering

RN Castellano, MR Notis, GW Simmons
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Volume:
27
Year:
1977
Language:
english
Pages:
9
DOI:
10.1016/0042-207x(77)90040-9
File:
PDF, 736 KB
english, 1977
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