4. Vertical electrode configuration to avoid contaminating...

4. Vertical electrode configuration to avoid contaminating particles in sputtered ZnO thin films

S. Maniv, I. Berman
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Volume:
28
Year:
1978
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(78)90005-2
File:
PDF, 538 KB
english, 1978
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