Enhanced depth control of ultrafast laser micromachining of...

Microelectronic Engineering 2012 / 10 Vol. 98

Enhanced depth control of ultrafast laser micromachining of microchannels in soda-lime glass

Rodríguez, Ainara, Arriola, Alexander, Tavera, Txaber, Pérez, Noemí, Olaizola, Santiago M.
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.06.021
Date:
October, 2012
File:
PDF, 730 KB
english, 2012
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