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Actuation of silicon pillar micro-mechanical resonators by Kelvin polarization force
Toffoli, Valeria, Dandash, Fadlallah, Pozzato, Alessandro, Borin, Daniele, Carrato, Sergio, Lazzarino, MarcoVolume:
111
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.05.013
Date:
November, 2013
File:
PDF, 1.21 MB
english, 2013