Monolithically integrated MEMS mirror array with low...

Precision Engineering 2013 / 10 Vol. 37; Iss. 4

Monolithically integrated MEMS mirror array with low electrical interference in wavelength-selective switches

Sakata, Tomomi, Sassa, Fumihiro, Usui, Mitsuo, Kodate, Junichi, Ishii, Hiromu, Machida, Katsuyuki, Jin, Yoshito
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Volume:
37
Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2013.05.008
Date:
October, 2013
File:
PDF, 2.14 MB
english, 2013
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