The characteristics of the ion and neutral fluxes incident on the substrate in an ion plating discharge
DG Armour, H Valisadeh, FAH Soliman, G CarterVolume:
34
Year:
1984
Language:
english
Pages:
6
DOI:
10.1016/0042-207x(84)90145-3
File:
PDF, 421 KB
english, 1984