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Influence of growth temperature on the electrical and structural characteristics of conductive Al-doped ZnO thin films grown by atomic layer deposition
Ahn, Cheol Hyoun, Lee, Sang Yeol, Cho, Hyung KounVolume:
545
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.07.045
Date:
October, 2013
File:
PDF, 920 KB
english, 2013