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Spectroscopic investigation of tantalum nitride thin film deposition by reactive sputtering in a triode system
S Dontchev, P Georgiev, K Gerassimova, J KourtevVolume:
35
Year:
1985
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(85)90018-1
File:
PDF, 296 KB
english, 1985