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4462881 Method of forming a multilayer thin film
Hiroshi Yamamoto, Noboru Shimizu, Masahide Suenaga, Yukihisa TsukadaVolume:
35
Year:
1985
Language:
english
DOI:
10.1016/0042-207x(85)90108-3
File:
PDF, 85 KB
english, 1985