Polymer shrinkage of hot embossed microstructures for higher aspect ratio and smaller size
Zhu, Xuelin, Cui, TianhongVolume:
195
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.02.015
Date:
June, 2013
File:
PDF, 1.27 MB
english, 2013