Multilayer X-ray mirrors prepared by triode sputtering...

Vacuum 1986 Vol. 36; Iss. 1-3

Multilayer X-ray mirrors prepared by triode sputtering using a new method of film thickness monitoring

C Sella, KB Youn, R Barchewitz, M Arbaoui
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Volume:
36
Year:
1986
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(86)90284-8
File:
PDF, 263 KB
english, 1986
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