Failure of zirconium silicide contacts during the silicidation process studied by AES and RBS
WS Brooks, TE Derry, JPF Sellschop, RG Cooperthwaite, L Kusztelan, AGK LutschVolume:
38
Year:
1988
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(88)90093-0
File:
PDF, 335 KB
english, 1988